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Etude d'un matériau diélectrique poreux de type SiOCH : effet des post-traitements plasma et de nettoyage et intégration
FR |
EN
| Auteur / Autrice : | Wilfried Puyrenier |
| Direction : | André Ayral, Vincent Rouessac |
| Type : | Thèse de doctorat |
| Discipline(s) : | Chimie des matériaux |
| Date : | Soutenance en 2007 |
| Etablissement(s) : | Montpellier 2 |
Mots clés
FR