Le moteur de recherche
des thèses françaises
'%3e%3cpath%20style='fill:%2300a0dc;fill-opacity:1;stroke:none;stroke-width:.144606;stroke-opacity:1;stop-color:%23000'%20d='M41.8%20100.088H52.28c.46%200%20.831.421.831.945v10.25c0%20.524-.37.946-.831.946H41.8c-.46%200-.831-.422-.831-.945v-10.251c0-.524.37-.945.831-.945z'/%3e%3cpath%20d='m47.072%20102.02-4.87%202.656%204.87%202.657%203.985-2.174v3.06h.885v-3.543m-7.969%201.851v1.771l3.1%201.691%203.098-1.691v-1.77l-3.099%201.69z'%20style='fill:%23fff;fill-opacity:1;stroke-width:.442726'/%3e%3ccircle%20style='fill:%23009f1d;fill-opacity:1;stroke:%23fff;stroke-width:.379704;stroke-linecap:round;stroke-linejoin:round;stroke-miterlimit:4;stroke-dasharray:none;stroke-opacity:1;stop-color:%23000'%20cx='54.151'%20cy='101.224'%20r='3.451'/%3e%3cpath%20d='m55.669%2099.387.659.664-3.075%203.104-1.634-1.649.66-.663.974.979%202.416-2.435'%20style='fill:%23fff;fill-opacity:1;stroke:none;stroke-width:.30061;stroke-miterlimit:4;stroke-dasharray:none;stroke-opacity:1'/%3e%3c/g%3e%3c/svg%3e)
Solutions technologiques avancées pour CMOS ultime : grille métal damascene, diélectrique high-k, SOI avec film mince, alumine enterrée et plan de masse
FR |
EN
| Auteur / Autrice : | Kyosuke Oshima |
| Direction : | Sorin Cristoloveanu, Hiroshi Iwai |
| Type : | Thèse de doctorat |
| Discipline(s) : | Microélectronique |
| Date : | Soutenance en 2004 |
| Etablissement(s) : | Grenoble INPG |