Etienne Blanc
IdRefMots clés
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Physique
Etat condense
Proprietes mecaniques et thermiques
Spectrometrie auger
Etude experimentale
Distribution concentration
Methode etude
Compose mineral
Couche mince
Microelectronique
Pulverisation faisceau ionique
Silicium oxynitrure
Auger electron spectrometry
Experimental study
Concentration distribution
Investigation method
Inorganic compound
Thin film
Microelectronics
Ion beam sputtering