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Nettoyage chimique humide de surfaces silicium (appliqué au recyclage), nettoyage chimique humide et préparation de surface d'alliages silicium-germanium et de couches de germanium pur
FR |
EN
| Auteur / Autrice : | Alexandra Abbadie |
| Direction : | Abel Rousset, Pascal Besson |
| Type : | Thèse de doctorat |
| Discipline(s) : | Sciences et génie des matériaux |
| Date : | Soutenance en 2004 |
| Etablissement(s) : | Toulouse 3 |