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Manipulation de nanoparticules de Si elaborées par implantation ionique à basse énergie dans des couches minces de SiO2 pour la fabrication de mémoires MOS non volatiles
FR |
EN
| Auteur / Autrice : | Marzia Carrada |
| Direction : | Alain Claverie, Caroline Bonafos |
| Type : | Thèse de doctorat |
| Discipline(s) : | Physique de la matière |
| Date : | Soutenance en 2003 |
| Etablissement(s) : | Toulouse 3 |
Mots clés
FR