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Mécanismes de croissance et caractérisation de films d'oxyde chimique sur faces (100) du silicium monocristallin : applications
FR |
EN
| Auteur / Autrice : | Sébastien Petitdidier |
| Direction : | Marius Chemla |
| Type : | Thèse de doctorat |
| Discipline(s) : | Électrochimie |
| Date : | Soutenance en 2002 |
| Etablissement(s) : | Paris 6 |
Mots clés
FR