Guy Turban
IdRefMots clés
FR
Sciences appliquees
Electronique
Fabrication microelectronique
Microelectronic fabrication
Couches minces
Spectroscopie
Spectroscopie infrarouge
Gravure
Gravure ionique reactive
Couche mince
Technologie
Condition operatoire
Controle fabrication
Etat surface
Emission electronique auger
Spectrometrie sims
Chimisorption
Impurete
Tantale
Tungstene