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Conception, Modélisation, Réalisation et Caractérisation d'un Micro Miroir Actif en Silicium
FR |
EN
| Auteur / Autrice : | Gilles Robert |
| Direction : | Serge Spirkovitch |
| Type : | Thèse de doctorat |
| Discipline(s) : | Sciences. Microélectronique |
| Date : | Soutenance en 1999 |
| Etablissement(s) : | Paris 7 |
Mots clés
FR